COFIN 03

COFIN 03 Soncini DIT-PRJ-04-014

Status NOT active project
DISI role Partner
Project type Research Project
Dimension National
Acquisition date 2003-11-01
Start date 2004-01-01
End date 2005-12-31
SAP code 40100659

Project details

Project astract -Development of a new type of hydrogen sensors based on the use of nanometer micromachined mesoscopic silicon wires thermally oxidized and covered with palladium to form a MOS capacitive structure. The presence of hydrogen modifies the extension of the silicon wire depleted zone which induces an easily measurable change in wire resistance.
Keywords sensors
Fundings 72000 €
Partners
  • Universita' degli Studi di Roma Tor Vergata
  • DIT-Unitn

DISI Sub-project details

Project astract -Development of a new type of hydrogen sensors based on the use of nanometer micromachined mesoscopic silicon wires thermally oxidized and covered with palladium to form a MOS capacitive structure. The presence of hydrogen modifies the extension of the silicon wire depleted zone which induces an easily measurable change in wire resistance.
Keywords silicon microsystems, sensors
Fundings 36000 €
Manager Giovanni Soncini