Sviluppo di tecnologie di fabbricazione e soluzioni progettuali per la realizzazione di rivelatori al silicio con struttura tridimensionale (3D) e di rivelatori privi di zona morta al bordo ("Active edge"))

TREDI DIT-PRJ-05-122

Status NOT active project
DISI role Partner
Project type Research Project
Dimension National
Acquisition date 2005-04-20
Start date 2005-05-15
End date 2005-12-31

Project details

Project astract This project aims at the development of fabrication technologies and design solutions for<br/>silicon detectors having three-dimensional electrodes and detectors with active-edge.<br/>This new detector concepts offer several advantages (higher efficiency, radiation hardness <br/>and fastest response time) over conventional planar detectors, at the expense of a quite <br/>complicated fabrication process. Design and process solutions allowing for a fabrication<br/>technology simplification will be investigated, keeping in mind the need for future large volume<br/>production of these detectors.<br/>
Keywords silicon detectors, 3d topology, radiation hardness
Fundings 15000 €
Partners
  • INFN - Trento
  • INFN Sezione di Trieste

DISI Sub-project details

Project astract The role of the Trento group deals with the device design and simulation and the electro-optical characterization. In 2005, the first batch of detectors fabricated at ITC-irst will be thoroughly tested, investigating the possible problems arising from the use of the single-type-column architecture. According to the results, the process flow and the layout for the second batch will be modified.
Keywords silicon detectors, fabrication technology
Fundings 4000 €
Manager Gian Franco Dalla Betta
Participating RP